Outgassing Rate Calculator: Surface Desorption & Bakeout Optimization

simulator advanced ~12 min
Loading simulation...
q = 1.3 × 10⁻⁷ Pa·m³/s/m² — unbaked SS after 10h pumping

Unbaked stainless steel after 10 hours of pumping shows an outgassing rate of about 1.3 × 10⁻⁷ Pa·m³/s/m². Baking at 200°C can reduce this by over 10×.

Formula

q(t) = q₁ × t⁻¹ (Pa·m³/s/m²)
Q_total = q × A_surface
Desorption energy: τ = τ₀ × exp(Ed / kT)

The UHV Barrier

Below about 10⁻⁴ Pa, the gas load from chamber walls exceeds the gas entering through leaks or from the volume. Water molecules, adsorbed in multiple layers on every surface exposed to air, desorb slowly over hours and days, maintaining a persistent gas load that limits base pressure. This outgassing is the central challenge of ultra-high vacuum technology.

Desorption Kinetics

The outgassing rate from metals follows an approximate 1/t decay during the first hours of pumping, reflecting the diffusion of water from bulk oxide layers. The characteristic energy for water desorption from stainless steel is about 0.9 eV, meaning that thermal activation at modest temperatures dramatically accelerates the process — the basis for bakeout procedures.

Bakeout Physics

Heating a vacuum chamber provides the thermal energy needed to overcome the desorption activation barrier. At 200°C, the desorption rate is thousands of times faster than at room temperature, so molecules that would take months to desorb at 25°C leave in hours. The key is that after cooldown, the cleaned surface has far fewer adsorbed molecules, giving a much lower room-temperature outgassing rate.

Material Selection

This simulation models outgassing for stainless steel, aluminum, copper, and glass — the four most common vacuum materials. Each has different initial outgassing rates and activation energies. Stainless steel dominates due to its strength and weldability, but OFHC copper achieves the lowest outgassing rates after bakeout, making it the material of choice for the most demanding UHV and XHV applications.

FAQ

What is outgassing?

Outgassing is the release of gas molecules adsorbed on or dissolved in vacuum chamber walls. Water vapor dominates for unbaked systems. The outgassing rate typically follows a 1/t power law during pumpdown and limits achievable base pressure in high and ultra-high vacuum systems.

Why is bakeout necessary for UHV?

At ultra-high vacuum (below 10⁻⁷ Pa), surface-bound water and hydrocarbons outgas too slowly to be removed by pumping alone. Heating the chamber to 150–450°C provides thermal energy to desorb these molecules rapidly, reducing outgassing rates by 100–1000× and enabling pressures below 10⁻⁸ Pa.

What materials have the lowest outgassing?

OFHC copper, titanium, and electropolished stainless steel (316LN) have the lowest outgassing after proper cleaning and bakeout. Aluminum is good but limited to lower bakeout temperatures. Polymers and elastomers should be avoided in UHV systems.

How long should I bake a vacuum chamber?

Typical bakeout durations are 24–48 hours at 150–250°C for stainless steel. The key metric is total thermal dose — higher temperature allows shorter bake times. Monitor the pressure during bakeout: when it drops to within 2× of the pre-bake level during baking, desorption is nearly complete.

Sources

Embed

<iframe src="https://homo-deus.com/lab/vacuum-science/outgassing/embed" width="100%" height="400" frameborder="0"></iframe>
View source on GitHub